| Customization: | Available |
|---|---|
| Sensor Type: | Reflective Optical Fiber |
| Wafer Size: | 6 to 12 Inch |
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For calibration steps in various devices within the semiconductor manufacturing process, capable of handling semiconductor wafers or glass substrates ranging from 6 inches to 12 inches. the products has been certified by SEMI S2. It is designed to minimize the contact area between the gripper and the wafer surface, thereby reducing particle contamination caused by surface friction. Customer-made services is available.
Product Features
Suitable for 200-300mm wafers
High-speed, high-accuracy centering and notch locating
Size, shape, material of spindle can be changed according to the wafer type
Spindle diameter, shape, and material can be changed based on wafer size and material, and Bernoulli adsorption method can be used
Control communicaiton mode: serial port RS2320 or parallel port I/O mode
Gaps that do not meet SEMI specifications and edge shapes can also be customized for design
| Item | Ag 106G | Ag120G | Ag114S | Ag108S |
| structure | Mechanical clamping type | Vacuum suction type | ||
| sersor type | Reflective optical fiber | Linear sensor | ||
| wafer size | 6'' | 8''-12'' | 6''-8'' | 8''-12'' |
| Time required to determine position | 2.5s(no re-clamping action is performed) | 3s(no re-clamping action is performed) | ||
| Position accuracy | Wafer Center: within±0.3mm, Notch Positioning: within±0.3° | Wafer Center: within±0.1mm, Notch Positioning: within±0.1° | ||
| Control communication method | RS232/RS485/TCP/IP | |||
| Power supply | DC24V 10A | DC 24V 6A | ||
| Vaccum | - | more than -53kpa | ||
Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience.
Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.
Q3:Why choose us?
A3:OEM/ODM/Designing service.
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