| Customization: | Available |
|---|---|
| After-sales Service: | Online Service |
| Warranty: | 1 Year |
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1. Focused Ion Beam Column
Resolution: 3 nm@30 KV
Probe current: 1 pA-50 nA
Accelerating voltage range: 500 V-30 kV
Ion source exchange interval: ≥1000 hours
Stability: 72 hours of uninterrupted operation
2. Nano-manipulator
Chamber internally mounted
Three-axis all-piezoelectrically driven
Stepper motor accuracy ≤10 nm
Maximum travel speed 2 mm/s
Integrated control
4. Gas Injection System
Single GIS design
Various gas precursor sources are available
Needle insertion distance ≥35 mm
Motion repeatability ≤10 μm
Heating temperature control repeatability ≤0.1°C
Heating range: room temperature ~ 90°C
Integrated control

| Technical Specifications | ||
| Component | Parameter | Specification |
| "Shadow" Ion Column | Resolution | 3 nm @ 30 kV |
| Probe Current | 1 pA ~ 65 nA | |
| Acceleration Voltage | 500 V ~ 30 kV | |
| Service Life | ≥ 1,000 hours | |
| Long-Term Stability | 72 hours (uninterrupted) | |
| Nanomanipulator | Installation Mode | In-chamber (Sample Warehouse) |
| Drive System | All-Piezoelectric | |
| Positioning Accuracy | ≤ 10 nm | |
| Maximum Speed | 2 mm/s | |
| Control Mode | Integrated | |
| Gas Injection System (GIS) | Configuration | Single Gas Injection |
| Telescopic Distance | ≥ 35 mm | |
| Positioning Accuracy | ≤ 10 µm | |
| Heating Temperature Range | Room Temperature ~ 90°C | |
| Temperature Control Precision | ≤ 0.1°C | |
| Control Mode | Integrated | |
| System Overview | Key Technology | High-Pressure Tunnel & Electron Tube (Magnetic Sample Compatible) |
| Core Advantage | Ion Beam-Electron Beam Synergy | |
| Expandability | Highly modular with fast ion source replacement | |

Our systems are trusted worldwide in leading research institutions and industrial labs.
Typical Applications Include:
Transmission Electron Microscope (TEM) Lamella Preparation
Circuit Edit and Prototyping for Semiconductor Devices
Cross-Sectioning and Failure Analysis
Nanoscale Device Fabrication and Machining
Site-Specific Material Deposition and Etching

Packaging & Freight Services
We ensure your semiconductor equipment arrives in perfect condition, anywhere in the world.
Secure Packaging: Protected with shock-absorbing bubble foam inside a robust wooden crate for maximum transit safety.
Global Logistics: We arrange and manage reliable shipping via road, sea, and air freight to meet your timeline and budget needs.
Your precision equipment is handled with care from our door to yours.