Projection Lithography Machine Suitable for Packaging Micro LED Mems

Product Details
Customization: Available
After-sales Service: Provided
Function: High Temperature Resistance, Anti-Corrosion
Gold Member Since 2023

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  • Projection Lithography Machine Suitable for Packaging Micro LED Mems
  • Projection Lithography Machine Suitable for Packaging Micro LED Mems
  • Projection Lithography Machine Suitable for Packaging Micro LED Mems
  • Projection Lithography Machine Suitable for Packaging Micro LED Mems
  • Projection Lithography Machine Suitable for Packaging Micro LED Mems
  • Projection Lithography Machine Suitable for Packaging Micro LED Mems
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  • Overview
  • Product Description
  • Our Clients
  • Certifications
  • Application
  • Exhibition & Customers
  • Packaging & Shipping
  • FAQ
Overview

Basic Info.

Model NO.
MPS-02
Demoulding
Pull Core
Condition
New
Certification
RoHS, ISO, CE
Warranty
12 Months
Automatic Grade
Automatic
Installation
Vertical
Driven Type
Electric
Mould Life
300,000-1,000,000 Shots
Product Name
Projection Lithography
Wafer Size
200mm Wafer (300mm Selectable)
Wafer Thickness
0.1mm ~ 5mm
Resolution
2um L/S
Linewidth Accuracy
+/-10%
Depth of Focus
20um
Front Engraving Accuracy
0.5um
Capacity (Throughput)
150 Wph (Wafers Per Hour)
Light Source Spectrum
365nm (I-Line)
Single Power Supply
Single Power Supply
Transport Package
Customized or Wooden Box Packaging
Specification
3100mm × 1750mm × 2750mm
Trademark
Himalaya
Origin
China
Production Capacity
100

Product Description

Product Description
MPS-02 Projection lithography 
Product advantages
1.High yield
2.Modular design
3.High reliability
4.Suitable for packaging MicroLED MEMS and other processes
Projection Lithography Machine Suitable for Packaging Micro LED Mems
Projection Lithography Machine Suitable for Packaging Micro LED Mems
 
Wafer Size 200mm Wafer(300mm selectable)
Wafer thickness 0.1mm~5mm
Resolution 2μm L/S
Linewidth accuracy ±10%
Depth of focus 20μm
Front engraving accuracy 0.5μm
Capacity 150WPH
Imaging material photoresist(PR)
Light source spectrum 365nm
Exposure energy 20-1000mj/cm² or higher
Reticle 9 inch
Applicable process positive exposure, positive Alignment
Single power supply AC380V-50HZ(Primary equipment)
Weight per unit 6500kg
Overall dimension(L×W×H) Host machine:3100mmL×1750mmW×2750mmH Accessory equipment:1300mmL×880mmW×1,650mmH
Temperature/humidity 22ºC±1ºC,30%-55%
Our Clients
Projection Lithography Machine Suitable for Packaging Micro LED Mems
We are privileged to collaborate deeply with various renowned partners across the semiconductor equipment ecosystem. Globally, we work with industry leaders such as Honeywell, Foxconn, and HP; domestically, we partner with top enterprises including Sunny Optical Technology, Sanan Optoelectronics, HT-Tech, Tsinghua Tongfang, TUS Holdings, and TCL. Additionally, we join hands with leading academic institutions like Xi'an Jiaotong University and Northwestern Polytechnical University, leveraging their research capabilities to drive technological innovation and facilitate the implementation of cutting-edge solutions in the semiconductor equipment sector.
 
Certifications

Projection Lithography Machine Suitable for Packaging Micro LED MemsWe are an ISO 9001-certified manufacturer and innovator specializing in semiconductor equipment, with 6 registered utility model patents (UM Patents) in China. Our patented technologies cover:
Semiconductor annealing systems
Cleaning equipment for semiconductor etching
UV debonding machines
And more .
Backed by ISO 9001 quality management, we ensure high precision, reliability, and efficiency in semiconductor manufacturing processes. Our R&D-driven solutions enhance production yield and cost-effectiveness for global clients in IC packaging, MEMS, and advanced wafer processing.

Partner with us for cutting-edge, patent-protected semiconductor equipment tailored to your needs.
 

 
Application

Projection Lithography Machine Suitable for Packaging Micro LED Mems

Exhibition & Customers

Projection Lithography Machine Suitable for Packaging Micro LED MemsProjection Lithography Machine Suitable for Packaging Micro LED MemsJiangsu Himalaya Semiconductor Co., Ltd. Was established in 2019, mainly engaged in international trade and integration of semiconductor industry equipment. The equipment is currently imported and exported to over 30 countries, with over 200 customers and suppliers, aiming to control the procurement of the highest cost-effective products in the final stage for customers, and strive for one-time payment collection and risk avoidance for suppliers!
Our main products:Die Bonder,Wire Bonding,Laser Marking(ID IC Wafer),Laser Grooving,Laser Cutting(Glass Ceramics Wafers Packaging,Laser Internal Modification Machine Si /Sic Wafe,Laser Internal Modification Machine Lt/Ln Wafer,Laser Annealing Machine for Si/Sic,Automatic Dicing Saw Machine(Wafer Packaging)),Automatic Silicone Dispensing Equipment.

Packaging & Shipping

 

Projection Lithography Machine Suitable for Packaging Micro LED Mems
FAQ
Projection Lithography Machine Suitable for Packaging Micro LED Mems
Projection Lithography Machine Suitable for Packaging Micro LED Mems


Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience. 

Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.


Q3:Why choose us?
A3:OEM/ODM/Designing service.

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