Product Features
• Standard support for FOUP and automatic door FOSB
• Unique door opening mechanism and precise motion control for high cleaning performance
Technical Specifications
• Wafer Specifications:8"~12"
• Carrier Type:12"FOUP FOSB,8"Open Casette
• Dimensions: 470X555X1340
• Cleaning: Class [email protected]μm
• Operation Time: With mapping; FOUP Open:19sec; FOUP Close:10sec
• Communication: RS232/RS485/Ethernet Port
• RFID (optional) RFID: TI 134kHz
• Power Supply: DC 24V 5A
• Negative Pressure: -50 ~ -80KPa
• Positive Pressure: 0.6~ -0.7MPa
• Weight: 70Kg