Wafer Automatic Transfer System Solution Equipment Factory

• Customization: Available
• After-sales Service: Free Training
• Warranty: One Year Service
• Model NO.: HM-01
• Application: Home Appliance, Environmental Equipment, Petroleum Machinery Manufacturing, Agriculture Machinery, Textile Machinery, Food Machinery, Aerospace Industry, Automotive Industry, Shoemaking Industry, Woodwork Industry
• Cooling System: Water Cooling
• Technical Class: Pulse Laser
• Applicable Material: Metal
• Structure Type: Gantry Type
• Laser Classification: Semiconductor Laser
• Laser Technology: Laser Control Fault Cutting
• Wafer Compatibility: Suitable for Wafer Transfer of 300mm and Below
• Trajectory Function: Can Realize Free End Trajectory and Oblique Insert
• Manipulator Cup Type: Single Arm (Anti-Fog)
• Manipulator Arm Model: Rb100swp
• Control Axis: 3
• Power Supply: AC 220V 2.2A Vacuum
• Weight: 40kg
• Wafer Support: 300mm and Smaller Wafers (200mm, 150mm)
• Transport Package: Packed with Wooden Box by Sea Shipping
• Specification: 1500kg
• Trademark: Himalaya
• Origin: China
• Production Capacity: 5000

Product Description

Product Description

The Wafer Automatic Transfer System is a precision robotic manipulator designed for semiconductor manufacturing, wafer handling, and vacuum process automation. It ensures high-speed, high-precision, and contamination-free transfer of wafers (up to 300mm) in cleanroom environments.

Wafer automatic transfer system solution equipment factory



Features
• Suitable for wafer transfer of 300mm and below
• Can realize free end trajectory and oblique insertion function

Specifications
Manipulator cup type: Single arm (anti-fog)
Manipulator arm model: RB100SWP
Control axis: 3
Factory: AC 220V 2.2A Vacuum
Weight: ≈40Kg
 

Product Parameters

 

Wafer Transfer Robot Specifications
Category	Specification
Wafer Compatibility	Suitable for wafer transfer of 300mm and below
Trajectory Function	Can realize free end trajectory and oblique insertion function
Manipulator Cup Type	Single arm (anti-fog)
Manipulator Arm Model	RB100SWP
Control Axis	3
Power Supply	AC 220V 2.2A Vacuum
Weight	≈40 Kg

 

Applications

 

1. Semiconductor Fabrication Plants (Fabs) - The Primary Application

 

• Application: Moving wafers through the hundreds of sequential steps required to build integrated circuits. This includes transportation between cleanroom bays and direct tool-to-tool integration.

2. Wafer Inspection Systems

 

Application: Automatically feeding wafers from a FOUP into the inspection tool (e.g., SEM, optical microscope, defect review tool) and positioning them with extreme accuracy for measurement or review.

3. Vacuum Process Chambers

• Application: Transferring wafers from the clean, atmospheric environment of the EFEM into a high-vacuum process chamber and precisely placing them on a chuck or pedestal.

4. Research & Development Labs

• Application: Prototyping new processes, testing new materials, and developing next-generation device architectures. The workflow is less linear and more iterative.

 

Key Features

High-Precision Wafer Handling

• Supports 300mm and smaller wafers (200mm, 150mm, etc.).
• Single-arm manipulator with anti-fog design to minimize contamination.
• Smooth and precise trajectory control for free

Packaging & Shipping

We provide railway, sea-freight and express service

our semiconductor equipment is wrapped with wooden pack.
 

FAQ

Q1: What is a wafer automatic transfer system?

A: A wafer automatic transfer system is a robotic handling system used in semiconductor manufacturing to automatically transport wafers between processing equipment, load ports, and storage cassettes while maintaining high precision, cleanliness, and speed.

Q2: What wafer sizes does this system support?

A: The system supports 300mm and smaller wafers (e.g., 200mm, 150mm).

Q3: Where is this system commonly used?

A: It is used in:
Semiconductor fabrication plants (fabs)
Wafer inspection systems
Vacuum process chambers
Research & development labs