| Customization: | Available |
|---|---|
| After-sales Service: | Yes |
| Condition: | New |
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| Wafer Size | 4''-12'' or customizable for compatible with two closely related size |
| Load Port | standard load port*3 or other customizable loading confirgurations are available |
| Manipulator | Single-arm or dual-arm wafer transfer robot |
| Wafer Grip Method | Vaccum,Bernoulli, Clamping, or other structural mechanisms can be customized |
| Pre-aligner | Aligner |
| Wafer ID Reading | Single-sided or Double-sided Wafer ID Reader |
| Communication | Supports standard SECS/GSM or simplified networking |
| Cleanliness | Class1 Mutiple grades available, up to Class 1 |
| Voltage Supply | Single phase AC220±10% 50HZ 14A |
| Dry Air | Positive Pressure:0.5-0.7 Mpa clean dry compressed air |
| WPH | ≥150(including OCR) |
| Equipment Dimensions | 1465*1397*2215mm |
| Weight | ≈800Kg |
Q1:How to choose a suitable machine?
A1:You can tell us the working piece material, size, and the request of machine function. We can recommend the most suitable machine according to our experience.
Q2:What is the warranty period for the equipment?
A2:One year warranty and 24 hours online professional technical support.
Q3:Why choose us?
A3:OEM/ODM/Designing service.
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